JPH076608Y2 - 真空排気装置 - Google Patents

真空排気装置

Info

Publication number
JPH076608Y2
JPH076608Y2 JP10658488U JP10658488U JPH076608Y2 JP H076608 Y2 JPH076608 Y2 JP H076608Y2 JP 10658488 U JP10658488 U JP 10658488U JP 10658488 U JP10658488 U JP 10658488U JP H076608 Y2 JPH076608 Y2 JP H076608Y2
Authority
JP
Japan
Prior art keywords
electrode
exhaust pipe
insulated exhaust
potential
charged particles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP10658488U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0229150U (en]
Inventor
勝男 内藤
和宏 西川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissin Electric Co Ltd
Original Assignee
Nissin Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nissin Electric Co Ltd filed Critical Nissin Electric Co Ltd
Priority to JP10658488U priority Critical patent/JPH076608Y2/ja
Publication of JPH0229150U publication Critical patent/JPH0229150U/ja
Application granted granted Critical
Publication of JPH076608Y2 publication Critical patent/JPH076608Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP10658488U 1988-08-12 1988-08-12 真空排気装置 Expired - Lifetime JPH076608Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10658488U JPH076608Y2 (ja) 1988-08-12 1988-08-12 真空排気装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10658488U JPH076608Y2 (ja) 1988-08-12 1988-08-12 真空排気装置

Publications (2)

Publication Number Publication Date
JPH0229150U JPH0229150U (en]) 1990-02-26
JPH076608Y2 true JPH076608Y2 (ja) 1995-02-15

Family

ID=31340227

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10658488U Expired - Lifetime JPH076608Y2 (ja) 1988-08-12 1988-08-12 真空排気装置

Country Status (1)

Country Link
JP (1) JPH076608Y2 (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2568132Y2 (ja) * 1992-01-09 1998-04-08 日本電子株式会社 高周波誘導結合プラズマ質量分析計における排気装置
JP7062559B2 (ja) * 2018-09-03 2022-05-17 株式会社ニューフレアテクノロジー 荷電粒子装置

Also Published As

Publication number Publication date
JPH0229150U (en]) 1990-02-26

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